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Confocal multiple sputtering system for thin film deposition
Equipment
Sistema confocale di sputtering multiplo per la deposizione di film sottili
Acquisition Date:
(January 1, 2026 - )
Overview
Affiliation
Overview
Term type
Grande attrezzatura di ricerca
Linked Units
Dipartimento di Scienze matematiche e informatiche, scienze fisiche e scienze della terra
Affiliation
Workgroups
Micro and Nanosystems
Laboratories
Laboratorio Nanomateriali
Has member
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